alert icon

Internet Explorer 8 or 9 is not supported by this website. Please either update your version of Internet Explorer, or use a more up to date browser.

Hide Message hide icon
Swagelok Penn

Your Authorized Swagelok Sales and Service Center

Atomic Layer Deposition (ALD) Valves

atomic layer deposition valves

Swagelok is a global technical leader and solutions provider in semiconductor chip manufacturing applications as well as the originator of ALD valve technology. Our ALD ultrahigh-purity (UHP) valves feature:

  • Ultrahigh cycle life with high-speed actuation
  • Cv range from 0.27 to 1.7
  • Full immersibility up to 392°F (200°C) with thermal actuators
  • Suitability for UHP applications with standard 316L VIM-VAR stainless steel body
  • Modular surface-mount, tube butt weld, and VCR® end connections
  • Electronic or optical actuator position-sensing option

Shop ALD Valves

ALD3 and ALD6 UHP Diaphragm Valves

ALD3 and ALD6 Catalog

ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

Specifications

Working Pressure Vacuum to 145 psig (10.0 bar)
Burst Pressure >3200 psig (220 bar)
Actuation Pressure 50 to 90 psig (3.5 to 6.2 bar)
Temperature 32° to 392°F (0° to 200°C)
Flow Coefficient (Cv) 0.27 or 0.62
Body Materials 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type (Size) Female VCR® face seal fitting (1/4 in. to 1/2 in.)
Male VCR face seal fitting (1/4 in. to 1/2 in.)
Modular surface mount high-flow C-seal (1.125 in. to 1.5 in.)

The ALD20 UHP Valve for High-Flow Applications

ALD20 Catalog

The ALD20 UHP valve is the latest addition to the Swagelok family of ALD products. The patent-pending design allows for utilization of challenging low-vapor pressure precursors. The ALD20 features an ultrahigh-purity bellows to promote clean operation and higher flow capacity than other ALD valves.

In addition, the ALD20 valve can be fully thermally immersed in the gas box and heated from 50°F (10°C) up to 392°F (200°C).

Specifications

Working Pressure Vacuum to 20 psig (1.4 bar)
Burst Pressure >3200 psig (220 bar)
Actuation Pressure 70 to 90 psig (4.8 to 6.2 bar)
Temperature 50° to 392°F (10° to 200°C)
Flow Coefficient (Cv) 1.2 (MSM) or 1.7 (straight pattern)
Body Materials 316L VIM-VAR or Alloy 22
Bellows Material Alloy 22 (5 μin. Ra finished)
End Connections
Type (Size) Female VCR® fitting (1/2 in.)
Rotable male VCR fitting (1/2 in.)
Tube butt weld, 0.50 in. long (1/2 in. x 0.049 in.)
Modular surface-mount high-flow C-seal (1.5 in.)

Push the Limits of ALD Technology

Download the ALD ultrahigh-purity valve catalog

Questions? Locate a sales and service center.

Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.

Caution: Do not mix/interchange Swagelok two-ferrule tube-fitting end connection components (or other products not governed by industrial design standards) with those of other manufacturers.